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Applied Materials Launches PROVision E-beam Inspection System

New PROVision system is the only e-beam inspection tool with 1nm resolution.

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By: DAVID SAVASTANO

Contributing Editor, Coatings World and Ink World, Coatings World and Ink World Magazine

Applied Materials, Inc. announced its next-generation e-beam inspection system is delivering the highest resolution and image quality at the fastest throughput to leading foundry, logic, DRAM and 3D NAND customers as they move to advanced nodes.
 
The Applied PROVision system incorporates innovations in e-beam technology for review and metrology. It is the only e-beam hotspot inspection tool offering down to 1nm resolution, allowing customers to detect the most challenging “killer” defects that other technologies cannot find, and to monitor process marginality to rapidly resolve ramp issues and achieve higher yields.
 
The PROVision system already has more than a dozen shipments, including repeat orders from a leading foundry and a major memory manufacturer. Additional systems are scheduled for shipment to existing and new customers in the second half of 2016.
 
Offering 3x faster throughput over existing e-beam hotspot inspection tools, the PROVision system ensures accurate process characterization, prediction and detection of performance- and yield-limiting defects throughout the fab product life cycle. 

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